AES is a surface analysis equipment that identifies and quantifies the elemental compositions on or near the surface by measuring the energies of emitted Auger electrons. JAMP-9500F Auger Microprobe is capable of high resolution SEM imaging, Auger image mapping and depth profiling.


  • Depth Profile Analysis
  • Spectrum Measurement
  • Surface Map Analysis
  • Line Analysis Measurement
  • Element Identification
  • Insulator Material Analysis
  • Elemental Microanalysis
    (≤1 atomic percentage)
  • Imaging of Part Analysis
    (max magnification 500k)

Combined AUGER/SEM Analysis

Auger image (map) and SEM image of defect located at the boundary between gold electrode and silicon matrix.

Tuesday, 20 August 2019
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