/ / / Auger Electron Spectroscopy (AES)

Auger Electron Spectroscopy (AES)

Starts at P9,700/sample (P7,760 student rate)

Auger Electron Spectroscopy (AES) is an analytical technique used to study surfaces. Secondary electrons that are emitted as a result of the Auger process are analyzed and their kinetic energy is determined. The identity and quantity of the elements are determined from kinetic energy and the intensity of the Auger peaks. Auger electrons have energies ranging from 50 eV to 3 keV. At these low energy values, electrons have a short mean free path. The escape depth of Auger electrons is therefore localized to within a few nanometers of the target surface, giving AES an extreme sensitivity to surface species.

    • Detection at approximately 6nm from the surface
    • Has SEM
    • Can determine oxidation
    • Elemental composition by layer/depth into the sample


Surface analysis of materials especially for surface-sensitive analysis, failure analysis – checking of contamination or foreign materials, corrosion analysis, material composition (surface and depth)
Industries: steels, metals, electronics and semiconductors, films, coatings, nanomaterials



Test Method

Sample ReAuger elemental identification (point and line analysis)
Auger mapping
Auger chemical state analysis
Auger depth profilingquirements

Sample Requirements

Conductive materials or samples
Should be dry and non-magnetic
Max size is 20mm x 20mm x 5mm (preferably smaller in size)

Test Limitations

Should not be used for magnetic samples
Not intended for biological samples (living, wet or moist)
Not intended for hazardous samples (toxic, fumes, etc.)